Trimethylgallium
ALDRICH/730734 - packaged for use in deposition systems
Synonym: Me3Ga; TMGa; TMG
CAS Number: 1445-79-0
Empirical Formula (Hill Notation): C3H9Ga
Molecular Weight: 114.83
EC Number: 215-897-6
MDL Number: MFCD00014841
Linear Formula: Ga(CH3)3
Product Type: Chemical
Steel cylinder used to package pyrophoric substances for use in Atomic Layer Deposition systems.
| bp | 92.5 °C/760 mmHg (lit.) |
| density | 1.132 g/mL at 25 °C |
| form | liquid |
| InChI | 1S/3CH3.Ga/h3*1H3; |
| InChI key | XCZXGTMEAKBVPV-UHFFFAOYSA |
| mp | -15.8 °C (lit.) |
| Quality Level | 100  |
| reaction suitability | core: gallium |
| SMILES string | C[Ga](C)C |
| Application: | Trimethylgallium can be used as: • A precursor to synthesize β-gallium oxide (β-Ga₂O₃) thin films for high-power electronic devices, offering superior breakdown voltage and thermal stability. • A precursor for epitaxial growth of gallium nitride (GaN) in blue LEDs and laser diodes, enabling high-brightness displays and optical communication systems. • A component in colloidal quantum dot synthesis for tunable near-infrared LEDs in biomedical imaging and telecommunications. • A source material for gallium arsenide (GaAs) layers in high-electron-mobility transistors (HEMTs), critical for 5G millimeter-wave amplifiers. |
| General description: | Trimethylgallium (TMGa) [Ga(CH3)3] is a high-purity (99.9999%), colorless, and pyrophoric organometallic compound widely used as a key precursor in metal-organic chemical vapor deposition (MOCVD) for semiconductor manufacturing. Its high volatility and metal-organic reactivity make it essential for producing gallium-containing thin films in optoelectronics, photovoltaics, and high-frequency devices. TMGa′s ultra-low impurity levels ensure performance consistency in applications such as LEDs, laser diodes, and high-electron-mobility transistors (HEMTs). Recent advancements have also extended its role to quantum dot synthesis and photonic integrated circuits for energy-efficient and IoT-enabled technologies. |
| Packaging: | 10 g in stainless steel cylinder |
| Symbol |   GHS02,GHS05 |
| Signal word | Danger |
| Hazard statements | H250 - H260 - H314 |
| Precautionary statements | P231 + P232 - P280 - P303 + P361 + P353 - P305 + P351 + P338 - P370 + P378 - P422 |
| Hazard Codes | F,C |
| Risk Statements | 14/15-17-35 |
| Safety Statements | 6-8-26-36/37/39-43-45 |
| RIDADR | UN 3394 4.3(4.2) / PGI |
| WGK Germany | WGK 3 |
| Supplemental Hazard Statements | EUH014 |
| bp | 92.5 °C/760 mmHg (lit.) |
| mp | -15.8 °C (lit.) |
| Density | 1.132 g/mL at 25 °C |
| UNSPSC | 12352103 |