Advanced Search



Tetrakis(dimethylamido)hafnium(IV)

ALDRICH/455199 - ≥99.99%

Synonym: TDMAH; Tetrakis(dimethylamino)hafnium(IV)

CAS Number: 19782-68-4
Empirical Formula (Hill Notation): C8H24HfN4
Molecular Weight: 354.79
MDL Number: MFCD01862473
Linear Formula: [(CH3)2N]4Hf
Product Type: Chemical
Catalog Number PKG Qty. Price Quantity
45-455199-25G 25 g
 $1220.00
1/EA		 Add To Favorites

 

assay ≥99.99%
density 1.098 g/mL at 25 °C
form low-melting solid
InChI 1S/4C2H6N.Hf/c4*1-3-2;/h4*1-2H3;/q4*-1;+4
InChI key ZYLGGWPMIDHSEZ-UHFFFAOYSA-N
mp 26-29 °C (lit.)
Quality Level 100 
reaction suitability core: hafnium
SMILES string CN(C)[Hf](N(C)C)(N(C)C)N(C)C
Analysis Note: Purity excludes ~2000 ppm Zr.
Application: Tetrakis(dimethylamido)hafnium(IV) can be used:• As an atomic layer deposition(ALD) precursor for deposition of hafnium oxide thin films for advanced semiconductor devices.
• As a precursor to fabricate polymer-derived ceramic nanocomposites.
• To prepare HfO2, CeO2, and Ce-doped HfO2 thin films on Ge substrates by using tris(isopropyl-cyclopentadienyl)cerium [Ce(iPrCp)3] precursors with H2O via ALD method.
• To produce Hf3N4 thin films with TDMAH and ammonia at low substrate temperatures at 150−250 °C.
General description: Tetrakis(dimethylamido)hafnium(IV) is an organometallic compound consisting of a central hafnium atom (Hf) surrounded by four dimethylamido ligands (NMe2). It is commonly used as a CVD/ALD precursor to produce high-quality Hf thin films. It is a solid with low melting point.
Packaging: 25 g in ampule
Purity ≥99.99%
mp 26-29 °C (lit.)
Density 1.098 g/mL at 25 °C
UNSPSC 12352103

The following items have been added to your cart:

Choose a favorite list for this item:
Catalog Number Description Price
$

Returns/Order support

Please fill out the form below if you want to request order support from Krackeler Scientific.


Quick Order

* Required


New Tariffs & Effects on Pricing

Tariff note: As we navigate the current environment of tariff surcharges and mid-year manufacturer price increases, we want to keep you informed. While we have avoided making specific decisions thus far, we anticipate that we will be forced to implement a cost adjustment policy to offset the fees we have already been absorbing. We are committed to transparency and moderation in this process.

800-334-7725
office@krackeler.com


Play Video

To Request a Quote

  1. Search or Browse for items and add to them to your Shopping Cart.
  2. Click the "Request Quote" button at the bottom of the Shopping Cart page.
  3. Fill out required fields.
  4. Optionally you can convert to standard checkout mode by choosing a payment type.
  5. Click "Request Quote" at the bottom of the page.

You will be contacted with a quote.

To Order From a Quote

  1. Register and login to the website.
  2. Receive a quote from your sales representative or customer service.
  3. Have your copy of the quote in hand.
  4. Visit our quote module to search for your quote.
Back to Top